Developed in pursuit of minimizing the weight and the footprint of valve while maintaining the same performance with our legacy diaphragm valve series.

For ultra high purity application, efficient purging design and minimal particle generation.

Optimal design for long cycle life based on value engineering (for XD12). Diaphragm: Caobalt alloy material for strength and corrosion resistance.

Technical characteristics :

• Normally closed pneumatic valve or manual
• Size: ¼’’, ½, ¾’’
• Connection : VCR, compression fitting, tube/tube
• Material: SUS316L
• Seat Material : PCTFE, PI, PFA
• Fluid Temperature: – 10 ~ 80°C
• Leak Rates : 1 x10 -10 Pa.m3/sec
• Cv : 0.27 à 1,7
• Surface Roughness : Ra =0.5 µm
• Cycle life = 4 Million cycles