The UXG and LG series are gate valves developed for separating a semiconductor vacuum system’s reactor from the transfer chamber.

The valve bodies are made of aluminum, and the valves operate via double action pneumatic actuator.

The heated gate valves not only heats the exterior using a conventional external heater but the built-in internal heater in the moving parts heats from the inside simultaneously, providing highly uniform heating performance.

The body and valve body can be set to an arbitrary temperature up to a maximum 180°C.

• Features :
  • Because the valve can be heated to high temperatures, it reduces contamination accumulation and adhesion to the seat so to greatly extend the maintenance period.
  • The body heater and valve heater are in separate channels, so the internal and external temperatures can be set individually.
  • Has a non sliding structure that keeps particles from being generated during opening and closing operations.
  • Equipped with a latch lock mechanism that keeps the valve closed during an emergency such as when the operating air pressure is lost.

• Specifications :