The L20 series: High Pressure Regulator

The regulator is designed to provide optimal performance and cleanliness for high purity semiconductor applications.
L20 SERIES

The L20 series is capable of controlling pressure for intermediate flow rates at source cylinder applications.

The L20 series is manufactured, cleaned and tested to exacting standards using the most advanced technology.

Standard high pressure flow type:

SUS 316 L, SUS + Hastelloy®
60 NL/min
14.8 MPa
0.99 MPa