Flow rate: 140 l/min Pressure: 4.1 bar

System Benefits:

• Improves CMP production yields by producing 200 to 1000 times less scraping particles than other pumps
• Increases filter life in CMP recirculation loops by up to 15 by generating fewer gels and large particles
• Reduces particle contamination problems in wet processes by generating 10 to 50 times fewer particles
• Improves and simplifies process control by eliminating pulsations, accurately controlling the rotor’s flow and speed
• Reduces maintenance costs by decreasing the component’s wear
• Increases equipment uptime and reduces maintenance costs in plating applications by providing clogging-free operation
• Saves valuable space in processing tools by having a very small footprint